DaON-100TE
[Manual Thermal & E-beam Evaporator]
GENERAL SPECIFICATION
| Substrate size | Max. 4inch Single or piece |
|---|---|
| Substrate Mechanism | Rotation(Max. 20rpm) / Heating(Max.650℃) |
| E-beam source | 25cc / 4pockets (10kW) |
| Thermal source | resistance boat type 2sets (2kW) |
| Pumping unit | Rotary pump + Cryo pump |
| Base pressure | ＜ 5x10-6 Torr |
| System control | PLC + Touch |
| System layout | 1400W x 1794H x 1000D |
| Gas flow | Thickness control |