TTowa-200C
[OELD Equipment]
SPECIFICATION
| Chamber type | Graphite box ＆ holder in sliding door type chamber |
|---|---|
| Sample size | 100mm x 100mm |
| Pumping | Rotary pump (400l/min) + TMP (600l/sec) |
| Ultimate pressure | 5 × 10-6 torr |
| Heating type | Separated Top/Bottom heating (Halogen lamp) |
| Max. Temp. | 1,000℃ |
| Ramping time | 1min |